SPM用于超精加工领域的重要性及特殊性  

Importance and Specialization of Application of SPM in Ultraprecision Machining

作　　者：赵清亮[1] 李旦[1] 董申[1] 

机构地区：[1]哈尔滨工业大学

出　　处：《制造技术与机床》1999年第8期8-10,19,共4页Manufacturing Technology & Machine Tool

摘　　要：讨论了扫描探针显微镜（ Ｓ Ｐ Ｍ） 作为一种显微工具的优势和不足。介绍了把 Ｓ Ｐ Ｍ 应用于超精密加工检测领域所要注意的问题，指出纳米级加工机理的研究将依赖于 Ｓ Ｐ Ｍ 的复合化及多功能化，只有实现了加工与检测的一体化才能正确评价加工方法及工艺参数的优化选择。The article discusses the advantages and shortages of SPM which is used as a microscopical tool. Problems should be noted in application of SPM in detecting aspect of pricision machining. It points out that the research on mechanism of machining at nano level will be dependent on the composition and multifunction of SPM. The machining process can be evaluated correctly and technological parameters are optimized only when machining and detection are integrated. it will lead the development of ultraprecision machining.

关 键 词：扫描隧道显微镜 超精加工 检测 

分 类 号：TG502.37[金属学及工艺—金属切削加工及机床] TH741.8[机械工程—光学工程]