硅微机械谐振传感器稳幅式真空计的研究  

Study of Stable Amplitude Type Vacuum Meter with Silicon Micromachining Resonance Sensor

作　　者：金心宇[1] 张昱[1] 周绮敏[1] 王跃林[1] 

机构地区：[1]浙江大学信息与电子工程学系

出　　处：《仪表技术与传感器》1999年第8期14-16,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金

摘　　要：文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。利用恒定振幅闭环测控电路方式，使整机具有良好的灵敏度和可靠性。真空度测量范围接近１０２～１０－１Ｐａ，测量响应速度为十几毫秒。This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.By using the circuit type of closed loop measurement and control with stable amplitude excitation signal, the vacuum meter possesses good sensitivity and reliability. The vacuum measuring range is near 10 2～10 -1 Pa, and the measuring response speed is 10-odd milliseconds.

关 键 词：硅微机械 谐振 真空传感器 闭环测控 真空计 

分 类 号：TB772[一般工业技术—真空技术]