碳纳米管微电极的直流介质阻挡放电特性  

Characteristics of Direct Current Dielectric Barrier Discharge in a Micro Electrode System with Carbon Nanotubes

作　　者：王雨化[1] 侯中宇[1] 回兵[1] 徐东[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海200240

出　　处：《微纳电子技术》2011年第1期21-25,36,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金(60871032)

摘　　要：研究了一种基于碳纳米管尖端的直流介质阻挡放电(DBD)微结构,使用MEMS加工工艺制作出深宽比0.5的侧壁相对的叉指状金属电极,在电极上电泳多壁碳纳米管,采用真空磁控溅射沉积二氧化硅介质层。在大气压下测试了所制备的DBD微结构样品的直流放电基本特性。实验结果表明,在几伏特的直流加载电压下即可检测到纳安量级的放电电流,并且放电电流对人体呼吸和环境气体变化有明显响应。放电起始电压小于10V并显现出明显的抑制电流自由增长的DBD放电特征,但电流下降持续时间达102～103s量级,大于常规常压DBD时间,显示出碳纳米管尖端的特异效应。The direct current dielectric barrier discharge （DBD） structure in a micro electrode system with carbon nanotube tips was researched. The electrode framework of the side wall in terdigital configuration with 0.5 of depth to width ratio was prepared by MEMS process. The multi-wall carbon nanotubes were patterned on the electrodes through electrophoresis deposition and covered with a magnetron sputtered silicon dioxide film. The fundamental characteristics of direct current discharges of the prepared DBD micro devices were examined in the atmospheric pressure. The results show that the discharge current of nA order can be detected when the ap- plied DC voltage is only several volts, and the discharge current has obvious respond to human breath interferences and different gas species. The discharge inception voltage is less than 10 V, and DBD characteristic of suppressing the free increase of the current apparently is appeared. However, the duration time of the current decreasing is 102 - 103 s and much more than the DBD time in the normal atmospheric pressure, which exhibit the specific effect of the carbon nanotube tip.

关 键 词：碳纳米管(CNT) 电泳碳纳米管 介质阻挡放电 微机电系统(MEMS) 气敏传感器 

分 类 号：TB383[一般工业技术—材料科学与工程]