应用白光共焦光谱测量金属薄膜厚度  

Measurement of thickness of metal thin film by using chromatic confocal spectral technology

作　　者：马小军[1] 高党忠[1] 杨蒙生[1] 赵学森[1] 叶成钢[1] 唐永建[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学精密工程》2011年第1期17-22,共6页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目

摘　　要：为了精确测量自支撑金属薄膜厚度及其厚度分布,提出了基于白光共焦光谱传感器的金属薄膜厚度测量技术。介绍了该技术的测量原理及系统结构,研究了系统的测量不确定度。利用相向对顶安装的白光共焦传感器组、精密位移平台并结合自制的薄膜厚度校准样品,实现了对厚度为10~100μm的自支撑金属薄膜的厚度及厚度分布的精确测量;通过研究系统的传感器测量不确定度、薄膜厚度校准样品不确定度、上下传感器安装误差及系统重复性测量误差,获得了系统的测量不确定度数据。试验结果表明,该系统的测量不确定度在0.12μm左右,基本满足惯性约束聚变（ICF）靶参数测量所需的稳定性好、测量精度高、非破坏性测量等要求。To precisely measure the thickness and thickness distribution of a self-supporting metal film,the measurement technology based on a chromatic confocal spectral sensor was established.The measurement principle and system structure were descripted in detail,and the measurement uncertainty was analyzed.The thickness and thickness distribution of the self-supporting metal film with the thickness between 10-100 μm were tested using the sensor group,precise displacement platform and precise calibrated samples.The measurement uncertainty was evaluated based on analysis of sensor accuracy,the uncertainty of calibration sample thickness,the positioning accuracy of two sensors and the system repetition uncertainty.Experimental results indicate that the measurement uncertainty is about 0.12 μm,which satisfies the requirements of Inertial Confinement Fusion（ICF） for target parameter measurement in high stabilization,high precision and non-destruction.

关 键 词：白光共焦光谱 金属薄膜 膜厚测量 惯性约束聚变 

分 类 号：O484.5[理学—固体物理] TH744.1[理学—物理]