碳靶电流对CrCN镀层摩擦系数的影响  

Influence of carbon target current on friction coefficient of CrCN coating

作　　者：胡鹏飞[1] 蒋百灵[1] 李洪涛[1] 

机构地区：[1]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《功能材料》2011年第1期175-177,181,共4页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)科技攻关资助项目(2005AA33H010)

摘　　要：采用闭合场非平衡磁控溅射离子镀技术于单晶硅和M2高速钢基片上制备CrCN镀层以研究C靶电流对CrCN镀层摩擦系数的影响,并通过能谱、原子力显微镜、X射线衍射、X射线光电子能谱分析了C元素的存在状态及其对CrCN镀层组织结构的影响规律。结果表明,当碳靶电流Ic从0A增大到1.5A时,镀层摩擦系数从0.75降至0.3,镀层中碳含量也随之增大,镀层表面晶粒直径变小,粗糙度也明显变小,Ic=1.5A时镀层表面粗糙度仅为Ic=0A时的7.4%。X射线光电子能谱分析表明,镀层中碳元素主要以C—C、C—Cr、C—O键形式存在,其中以C—C键形式存在的自由碳,能起到固体润滑的作用,可显著减低镀层的摩擦系数。The influence of carbon target current on friction coefficient of CrCN coating was studied through preparation of coatings deposited on single crystal silicon and M2 high speed steel（HSS） substrate using closed-field unbalanced magnetron sputtering ion plating technique.The existing form of carbon and the influence regularity of carbon content on the organization structure of CrCN coating were analysised by EDS,AFM,XRD and XPS.The results show that the friction coefficient of coating decreases from 0.75 to 0.3,the carbon content of coating increases too with the increasing of carbon target current from 0 to 1.5A,as the same time the diameter of crystal grain becomes smaller and the roughness of the coatings becomes smaller too,the roughness of coating when Ic=1.5A is 7.4% of which when Ic=0A.The analysis of XPS shows that the carbon exists as the forms of C—C,C—Cr,C—O,and in which the free carbon existed as form of C—C can play the role of solid lubrication and can significantly reduce the friction coefficient of coating.

关 键 词：磁控溅射 CrCN镀层 摩擦系数 原子力显微镜 X射线衍射 X射线光电子能谱 碳键 

分 类 号：TG178[金属学及工艺—金属表面处理]