ZnO纳米针阵列合成及台阶动力学生长机理研究  

Synthesis of ZnO Nanoneedles Array and Growth Mechanism of Step Kinetics

作　　者：唐斌[1] 邓宏[2] 税正伟[1] 张强[1] 刘忠华[1] 谌贵辉[3] 

机构地区：[1]西南石油大学理学院,成都610500 [2]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054 [3]西南石油大学电气信息学院,成都610500

出　　处：《人工晶体学报》2010年第6期1485-1489,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(50802012)资助项目;四川省教育厅青年基金(10ZB066);西南石油大学校级科技基金(2010XJZ197)

摘　　要：采用化学气相沉积系统,不用催化剂,生长过程中采用变温技术,在S i基片上合成了ZnO纳米针阵列。扫描电子显微图(SEM)显示ZnO纳米针阵列整齐密集生长在基片上,其棒状部分粗细均匀,直径约100 nm。透射电子显微照片(TEM)显示ZnO纳米针尖端呈现一系列的台阶。X射线衍射(XRD)图谱上只存在ZnO的(002)衍射峰,说明ZnO纳米针沿c轴择优取向。运用台阶动力学和奇异面生长理论分析表明ZnO纳米棒是典型的奇异面上单二维成核法向层生长机制。当单圈圆台阶扫过整个晶面的时间ts大于奇异面法向生长一个台阶高度所用时间tn时,在纳米棒顶端形成针尖;当单圈圆台阶扫过整个晶面的时间ts小于或等于奇异面法向生长一个台阶高度所用时间tn时,在纳米棒顶端不能形成针尖。ZnO nanoneedles array were synthesized with catalyst-free by chemical vapor deposition（CVD） technique on Si substrate.The SEM images show that of ZnO nanoneedles trunk of average diameters of 100 nm were aligned on Si substrate well.TEM images show that there are some steps on the top of ZnO nanoneedles.Only（002） diffraction peaks of ZnO can be found on the XRD patterns of the samples,which show as-grown nanoneedles highly crystalline in nature and grow along the ／ direction.The growth mechanism of ZnO nanoneedles array is consistent with step kinetics and bizarre surface growing and crystal growth is a typical simple-two-dimensional-nucleation normal-layer-growth.Suppose that ts is the elapsed time of a circle step movement from r0 to R and tn is the elapsed time of increasing by one step along normal direction.When tstn,the needle tips are synthesized on the top of the nanorods.when ts≤tn,the needle tips can not form on the top of the nanorods.

关 键 词：ZnO纳米针阵列 化学气相沉积 台阶动力学 奇异面 

分 类 号：TN304[电子电信—物理电子学]