压电超声微马达精密驱动的二维微动台  

A Fine Positioner with Two Freedoms Driv en by Piezoelectric Ultrasonic Motors

作　　者：董蜀湘[1] 王树昕[1] 邱海波 李龙土[1] 

机构地区：[1]清华大学新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《压电与声光》1999年第5期360-362,384,共4页Piezoelectrics & Acoustooptics

摘　　要：发展了一种采用压电超声微马达精密驱动控制的二维微动台及其控制电路。利用压电超声马达的低速、大扭矩、高分辨率特性，直接驱动微动台的微调旋钮，可获得很高的位移分辨率和大的驱动力。利用一个单片机控制系统，通过对超声马达驱动信号的斩波控制实现了微动台步进位移的连续调整。已研制的二维微动台，采用一对直径为１５ ｍ ｍ ，长２５ ｍ ｍ 的压电超声微马达作为驱动控制元件，已获得１２ ｎｍ 的位移分辨率和１０ Ｎ的驱动力。A fine positioner with two fre edoms driven directly by a couple of pie zoelectric ultrasonic motors with small size (motor size:15 mm in diameter, 25 m m in length) was developed in this paper . A very high displacement resolution an d large driving force of the positioner can be obtained by using the characteris tics of large torque at low speed and hi gh angle resolution of ultrasonic motor. Under the instructions of microcontroll er, the positioner could move in steppin g mode responding to a pulse signal. A p rototype with displacement resolution of 12 nm and driving force of 10 N has been applied to fine regulating mechanism of laser resonant cavity successfully.

关 键 词：微动台 压电超声马达 精密控制 

分 类 号：TM384.03[电气工程—电机]