超精密柔性压电式微位移机构的研究  

Study on ultra-precision flexible piezoelectric micro-motion mechanism

作　　者：荆丹[1] 陶晓巍[1] 李迎春[1] 

机构地区：[1]长春工业大学机电工程学院,长春130012

出　　处：《现代制造工程》2010年第12期133-136,共4页Modern Manufacturing Engineering

基　　金：国家教育部基金资助项目(208032)

摘　　要：设计了一种超精密压电式微位移机构,此机构以压电陶瓷作为驱动器,以对称杠杆式柔性铰链放大机构作为导向机构,弥补压电陶瓷位移行程过小的缺点。机构输出位移由原来的11.6μm放大到100μm,能够满足许多长行程、超精定位运动的需要。对此微位移机构进行定位精度测试,并将它作为位移补偿装置安装于精密滚珠丝杠副驱动的机床上,机床定位精度由原来的1μm上升到0.01μm,定位精度得到显著提高。Ultra-precision piezoelectric micro-motion mechanism is designed which is based on piezoelectric actuator and symmetrical lever-type flexible hinge magnifying mechanism.The flexible hinge can make up for the deficiency of little stoke of the piezoelectric ceramics.The output displacement of the mechanism is amplified from 11.6μm to 100μm which can meet the requirement of long stroke and ultra-precision position.A position accuracy test is done to the mechanism.And put the mechanism on the machine which is driven by precision ball screws.Then the position accuracy of the machine increases from 1μm to 0.01μm.the position accuracy increases greatly.

关 键 词：压电陶瓷微位移器件 柔性铰链 线切割 精密定位 

分 类 号：TH703.8[机械工程—仪器科学与技术]