DMF溶液中导电玻璃上沉积类金刚石薄膜  

DLC Films Deposited on Conductive Glass in DMF Solution

作　　者：蔡锴[1] 曹传宝[1] 酒金婷[1] 傅强[1] 汪浩[1] 朱鹤孙[1] 

机构地区：[1]北京理工大学材料科学研究中心,北京100081

出　　处：《应用化学》1999年第4期80-82,共3页Chinese Journal of Applied Chemistry

基　　金：国家自然科学基金

摘　　要：The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp 3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330～2000 nm and electrical resistivity of 10 10 Ω·cm.The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp 3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330～2000 nm and electrical resistivity of 10 10 Ω·cm.

关 键 词：类金刚石膜 液相沉积法 制备 DMF溶液 

分 类 号：O613.72[理学—无机化学]