SiO_2基Mach-Zehnder型传感芯片的制备与敏感性研究  

The sensing properties of Mach-Zehnder sensor chip based on SiO_2

作　　者：吴远大[1] 姜婷[1] 安俊明[1] 李建光[1] 王玥[1] 王红杰[1] 胡雄伟[1] 

机构地区：[1]中国科学院半导体研究所光电子研究发展中心,北京100083

出　　处：《光电子．激光》2011年第2期159-162,共4页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60707008;60977045);国家"863"计划资助项目(2007AA03Z420);中科院半导体所知识创新工程前沿方向资助项目(ISCAS2008T09)

摘　　要：设计并制作了一种基于SiO2/Si材料的Mach-Zehnder干涉仪（MZI）型集成光波导传感芯片。采用不同浓度的NaCl溶液对传感芯片的敏感特性进行了测试分析,研究结果表明,该传感芯片对特定浓度NaCl溶液的响应和恢复时间分别为1.0 s和0.6 s,可测最小折射率变化为2×10-4RIU（单位折射率变化）,在NaCl溶液折射率1.3488~1.3736范围内具有较好的线性响应。An integrated Mach-Zehnder interferometer（MZI） sensor chip was designed and fabricated based on SiO2/Si.And the sensing properties were tested using NaCl solution.The tested results show that the response and recovery time of the chip to NaCl solution are 1.0 s and 0.6 s,respectively,the minimum detectable refractive index variation is 2×10-4 RIU,and a good linear response is presented within the refractive index from 1.348 8 to 1.373 6.The feasibility of applying the MZI platform for highly sensitive biological and chemical sensor was shown with the NaCl solution experiments.

关 键 词：Mach-Zehnder干涉仪(MZI) 光波导传感 NACL溶液 SIO2/SI 敏感性 

分 类 号：TN256[电子电信—物理电子学]