微波椭偏法测量不透明材料的厚度  

Measuring the thickness of opaque material using microwave ellipsometry method

作　　者：张亮[1] 曹力丹[2] 潘永华[3] 高惠滨[3] 

机构地区：[1]南京大学材料科学与工程系,江苏南京210093 [2]南京大学匡亚明学院理科强化部,江苏南京210093 [3]南京大学物理系,江苏南京210093

出　　处：《物理实验》2011年第2期6-10,共5页Physics Experimentation

摘　　要：在传统的激光椭偏法测量厚度的基础上,用微波取代激光测量了不透明材料的厚度.分析了偏转角及反射干扰产生的误差,并提出了修正方法.测量结果表明:该方法可以比较精确地测量铝板和塑料板的厚度;由于散射的影响,表面磨砂的有机玻璃板的厚度测量误差很大.Based on the traditional laser ellipsometry method,the thickness of opaque material was measured using microwave ellipsometry.The errors caused by deflection angle and reflecting disturbance were analyzed,and the correct methods were present.The experiment results indicated that the thickness of aluminium plate and plastic plate could be measured accurately,and thickness of frosted organic glass plate could be measured roughly because of scattering.

关 键 词：厚度 不透明材料 椭圆偏振法 微波 

分 类 号：O435[机械工程—光学工程]