化学气相沉积钨管开裂原因分析  

Cracking Causes Analysis of CVD Tungsten Tube

作　　者：马捷[1] 蒙丽娟[1] 魏建忠[1] 王从曾[1] 

机构地区：[1]北京工业大学材料学院,北京100124

出　　处：《中国表面工程》2011年第1期29-32,39,共5页China Surface Engineering

摘　　要：采用切环测量法及X射线应力分析方法对化学气相沉积制备的开裂钨管进行测量与分析。结果表明,在钨管内表面较大残余拉应力作用下,裂纹萌生于钨管内表面两个邻近柱状晶的晶界,沿柱状晶的晶界向钨管外壁扩展;钨管外表面存在较大的残余压应力对裂纹的继续扩展起阻碍作用。Cracked tungsten tubes prepared by chemical vapor deposition were investigated by ring machine cutting method and X-ray stress analysis system.The results showed that crack initiating at two neighboring columnar crystal grain boundaries of the internal surface with the action of large residual tensile stress in the internal surface of the tungsten tube,and the propagation expended from columnar crystal grain boundaries to the outer surface of the tungsten tube.The existence of a large residual compressive stress on the outer surface of tungsten tube can arrest propagating cracks.

关 键 词：化学气相沉积 钨管 开裂 残余应力 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG146.411[金属学及工艺—金属学]