改进的Hindle方法检测凸非球面的研究  

Testing convex aspherical surfaces with optimized modified Hindle arrangement

作　　者：马杰[1,2,3] 朱政[1,2] 

机构地区：[1]中国科学院国家天文台南京天文光学技术研究所,江苏南京210042 [2]中国科学院天文光学技术重点实验室,江苏南京210042 [3]中国科学院研究生院,北京100049

出　　处：《红外与激光工程》2011年第2期277-281,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金委员会与中国科学院天文联合基金资助项目(10978021)

摘　　要：凸非球面,尤其是大口径快焦比凸非球面的光学检验一直是非球面加工中的难点。针对凸非球面光学元件加工检验困难的问题,研究了一种改进的Hindle方法,解决了经典的Hindle方法需要大口径辅助球面镜和存在中心遮挡等不足。利用该方法对一块Φ88 mm,焦比F/1.9的玻璃材料凸双曲面镜进行检验加工实验,对系统进行了分析优化,简化了检验光路的结构,克服了此种改进的Hindle方法检验时被检镜需要镀膜的缺陷,简化了加工工艺流程,极大地拓宽了该方法的适用范围。加工完成后经移相式数字干涉仪检测,镜面均方根(RMS)误差为0.020λ,验证了优化后方法的可行性。检验结果和对系统的进一步分析表明:经过优化后,改进的Hindle方法能够对多种凸非球面进行检验,是一种有效的高精度检验方法。It is difficult to fabricate and test convex aspherical surfaces, especially for fast-focal-ratio, large-aperture convex aspheical surfaces. To solve this problem, a modified Hindle arrangement was discussed, which can avoid central obscuration, overmuch large aperture of auxiliary mirror and other limitations of conventional testing methods. But there was a shortcoming that the glass substrate would require a reflective coating for each test cycle to get enough reflected light for testing in original arrangement. In order to overcome this disadvantage, the method was analyzed and optimized. As a result, it became more simpler and overcame the shortcoming of restriction on reflectivity of mirror under test. The experiment of testing and fabricating a hyperboloid glass mirror （~ 88, F/1.9） was carded out to examine the feasibility of optimized arrangement. After fabrication, the root-mean-square （RMS） of the mirror was 0.020）t, which was given by a WYKO digital interferometer. The test result and further analysis show that the optimized modified Hindle arrangement can test more kinds of convex aspherical surfaces than previous solutions, and is demonstrated to be an effective, high-precision testing method.

关 键 词：光学测量 非球面检测 零位检验 凸非球面 

分 类 号：O439[机械工程—光学工程]