基于仿真的半导体自动物料搬运系统调度优化  

Simulation-based Dynamic Scheduling Optimization for Automated Material Handling Systems in Semi-conductor Manufacturing

作　　者：沈正花[1] 陆志强[2] 

机构地区：[1]上海交通大学中美物流研究院,上海200240 [2]上海交通大学机械与动力工程学院,上海200240

出　　处：《工业工程与管理》2011年第1期85-90,共6页Industrial Engineering and Management

基　　金：国家自然科学基金资助项目(70771065);国家高技术研究发展计划(863)重点项目(2009AA043000;2009AA043001)

摘　　要：利用Arena仿真软件对半导体制造中的Intrabay系统进行了仿真建模,根据关键因子和等待比例两个变量将系统状态分为三种情况,利用遗传算法与仿真模型结合来确定两个变量的阈值和三种系统状态下各自采用的调度规则,实现系统的动态调度。仿真实验表明,所确定的调度规则比使用静态调度最长等待时间规则获得了更好的性能指标。A discrete event simulation model of intrabay system based on Arena was developed to implement the dispatching rules.The status of the system was classified into three categories by critical factor and percent of waiting.Simulation based Genetic Algorithm procedure was employed to search for optimized critical factor and percent of waiting as well as rules to use under the three different situations.The result shows that the optimized dynamic scheduling rule outperforms the longest waiting time rule.

关 键 词：自动物料搬运系统 动态调度 仿真模型 遗传算法 

分 类 号：F273[经济管理—企业管理]