声表面波驱动的非接触式转动马达  

Noncontact rotary motors driven by surface acoustic waves

作　　者：程利平[1] 张淑仪[1] 谷欢欢[1] 水修基[1] 杨跃涛[1] 

机构地区：[1]南京大学声学研究所近代声学实验室,南京210093

出　　处：《声学学报》2011年第2期211-214,共4页Acta Acustica

基　　金：国家自然科学基金项目(10774074;10874083)

摘　　要：在研究摩擦力驱动的接触式转动马达的基础上,本文研制了一种由声表面波驱动的非接触式转动马达。这种马达的定子选用128°YX-LiNbO_3晶体,在晶体表面光刻两对叉指换能器,由叉指换能器在定子表面激发两列平行而反向传播的声表面波。定子表面铺一层流体,转子就浮在流体表面。当定子表面有两列平行而反向的声表面波传播时,流体层中就会产生平行而反向的声流,这种黏性流体的声流运动就会驱动转子运动。实验上测定了马达的角速度随驱动电压、流体层厚度以及流体运动黏性系数变化的结果。同时,我们也发现,在相同工作频率下,非接触式转动马达的阈值电压远小于接触式。On the basis of the research of friction-driven rotary motors,a kind of noncontact rotary motors driven by surface acoustic waves（SAWs） is fabricated.In the prototype of the motor,two surface acoustic waves propagating in the antiparallel directions are introduced on the stator,which are excited by two pairs of interdigital transducers（IDTs） on the 128°YX-LiNbO_3 substrate.A liquid layer is loaded on the stator,and the rotor is suspended on the surface of the liquid.Two antiparallel acoustic streaming flows are produced by both acoustic waves in the liquid.The motion of the viscous liquid finally drives the rotor to move.Some preliminary experimental results,such as the variation of the angular velocity of the noncontact motors with the driving voltage of the IDTs,the thickness of the liquid layer and the viscosity of the liquids,are presented.It is also found that,with the same operating frequency,the threshold of the driving voltage of the noncontcat rotary motor is much smaller than that of the friction-driven ones.

关 键 词：声表面波 非接触式 驱动电压 马达 转动 叉指换能器 晶体表面 流体运动 

分 类 号：O429[理学—声学]