基于PSD的孔径测量系统设计  

Design of Inradius Measuring System Based on PSD

作　　者：林力[1] 邾继贵[1] 王仲[1] 刘常杰[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《现代科学仪器》2011年第1期15-18,共4页Modern Scientific Instruments

基　　金：基于激光/CCD原理的汽车精密耦件自动化检测共性技术研究(2009ZX04014-092);863计划(2008AA042407)

摘　　要：为了适应现代化生产和在线检测,提出了应用位置敏感探测器及激光三角法原理实现非接触内径测量的测量系统设计方案。分析了位置敏感探测器工作原理,系统测量原理,及电路原理和电路元件参数,实现了微弱电流的提取、放大、转换。整个测量系统的测量范围为1mm,采用加工精度为1μm、直径为90mm的内径标准件对测量系统进行精度校验,实验表明,在1mm测量范围内系统测量精度高于5%。In order to adapt the modern manufacture and the measurement on the product line,it comes out with a measuring system design which uses position sensitive detector（PSD） and laser triangulation to actualize the non-contact measurement of inradius.It analyses the operational principle of PSD,measuring principle of the system,principle of the circuit and parameter of circuit elements,and actualizes the picking-up,magnifying,and conversion of the weak signal.The measuring range of the system is 1mm,and there is a normative inradius apparatus,which inradius is 90mm and machining resolution is 1um,being used to verify the sensor.The experiment data indicate that the measuring precision of the system is higher than 5%.

关 键 词：激光三角法 内径测量 位置敏感探测器 跨阻放大器 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]