基于LabVIEW的微机械陀螺自动测试系统开发  

Development of Automatic Test System for Micromachined Gyroscope Based on LabVIEW

作　　者：何春华[1,2] 崔健[1] 闫俊杰[1] 林龙涛[1] 王福娟[2] 郭中洋[1] 杨振川[1] 蔡志岗[2] 闫桂珍[1] 

机构地区：[1]北京大学微电子学研究院微米/纳米加工技术国家级重点实验室,北京100871 [2]中山大学光电材料与技术国家重点实验室,广州510275

出　　处：《传感技术学报》2011年第2期170-174,共5页Chinese Journal of Sensors and Actuators

摘　　要：为了快速评估微机械陀螺的性能参数,结合NI PXI 4461数据采集卡,用LabVIEW软件实现了陀螺信号处理算法和若干关键指标测试功能,包括陀螺扫频测试、闭环驱动控制测试、标度因数和零偏等相关性能测试。实验结果表明,该自动测试系统借助LabVIEW强大的信号处理功能以及灵活的在线调试大大地提高了陀螺芯片测试与筛选的效率,可以快速可靠地挑选出性能优良的陀螺芯片,对陀螺的生产加工具有重要的促进作用。An automatic test system is realized to evaluate the performance of micromachined gyroscope efficiently.The system is based on LabVIEW software and NI PXI 4461 data acquisition card.Some key performance indices measurements such as sweep-frequency,closed-loop driving control,scale factor and zero drift etc were carried out using the test system.Experimental results demonstrated that the automatic test system enhanced the gyro chip test and sifting＇s efficiency greatly with the help of LabVIEW＇s powerful processing function and flexible debugging on line,it could pick out high-quality gyro chips reliably and make a significant promotion to gyroscope＇s processing and production.

关 键 词：微机械陀螺 性能测试 闭环驱动控制 LABVIEW软件 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]