水基金属有机物分解法制备Ba_(0.5)Sr_(0.5)TiO_3薄膜的研究  

Preparation of Ba0.5Sr0.5TiO3 Thin Film by MOD MethodUsing Hydrate Precursor Solution

作　　者：何夕云[1] 丁爱丽[1] 仇萍荪[1] 罗维根[1] 

机构地区：[1]中国科学院上海硅酸盐研究所

出　　处：《功能材料》1999年第4期394-396,共3页Journal of Functional Materials

摘　　要：制备了水基Ｂａ２＋、Ｓｒ２＋、Ｔｉ４＋三元有机物溶液。根据红外光谱测定及对比实验分析了溶液配制过程中化学反应机理。采用金属有机物分解法（ＭＯＤ）制备Ｂａ０．５Ｓｒ０．５ＴｉＯ３（ＢＳＴ）薄膜。通过ＸＲＤ、ＳＥＭ、ＴＥＭ、电子衍射及阻抗分析仪等分析测试手段，研究薄膜的相结构、微观形态及电性能。结果表明，所制备ＢＳＴ薄膜呈现纯钙钛矿晶相结构，结晶完整，晶粒小（１０～５０ｎｍ），显微结构均匀致密，并具有良好的电性能（电容密度为１６０ｎＦ／ｃｍ２，薄膜厚度４００ｎｍ）。A ternary hydrate precursor solution of Ba2+,Sr2+,Ti4+ was synthesized for preparing barium strontium titanate thin film,Ba0.5Sr0.5TiO3 (BST). The chemical reactions in the solution were investigated by IR analysis and related experiments.The phase structure and microstructure of BST thin film were examined by XRD,SEM,TEM and electric diffraction.The electric properties of BST thin film were studied by resistant analysis method.The BST thin film fabricated from the hydrate precursor solution exhibits pure perovskite phase,fine crystal (1050nm),uniform microstructure and good electric properties (capacitance density is 160nF/cm2 while thickness of the thin film is 400nm.

关 键 词：水基前驱物溶液 BST薄膜 MOD法 集成电路 

分 类 号：TN304.055[电子电信—物理电子学]