金属亚波长小孔的光传输特性仿真模型  

Simulation Model of Optical Transmission of Sub-Wavelength Holes on Metal Films

作　　者：辛骞骞[1] 居瓅[1] 戎瑞芬[1] 曾韡[1] 

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《复旦学报（自然科学版）》2010年第6期757-763,共7页Journal of Fudan University：Natural Science

摘　　要：用三维全矢量有限元时域差分方法计算了亚波长单孔以及二维周期性孔阵列的超透射特性,分析了平面波光源通过金属圆孔点阵后,透射曲线随着点阵周期、孔径、金属薄膜厚度、介质材料和金属材料变化的规律,以及局域表面等离子体和表面等离子体共振对超透射现象的影响.证实了表面等离子共振对透射曲线中透射谷的位置起到决定性作用,而透射峰的位置除了受到介质、金属材料和点阵周期的影响之外,还会随着金属薄膜的厚度的减薄和亚波长圆孔孔径的增大出现红移.用聚焦粒子束刻蚀制备了金/氧化硅演示结构,实测与仿真结果具有较好的一致性.Light transmission through a single cylindrical hole or a periodic hole array with the size of sub-wavelength is calculated by three dimensional finite-difference-time-domain（FDTD） simulation.The relationship between the extraordinary optical transmission and key device parameters,including array period,hole diameter,metal film thickness,and material is analyzed.The contributions from local surface plasmon and surface plasmon polarization were taken into consideration.It is found that the transmission valley depends on the surface plasmon polarization;and the transmission peak is sensitive to the device parameters.Red-shift phenomenon of the peak occurs with film thickness decreasing or hole diameter increasing.A demo device was fabricated by focused ion beam;the measured result is consistent with the simulation.

关 键 词：表面等离子体 亚波长小孔 超透射 有限元时域差分 

分 类 号：TN929.11[电子电信—通信与信息系统]