一种新型微梁阵列传感器设计及实现  

Design and Realization of New Optical Sequential Readout for Micro-cantilever Array

作　　者：薛长国[1] 张广平[1] 张青川[1] 伍小平[1] 

机构地区：[1]中国科学技术大学中科院材料力学行为和设计重点实验室,合肥230027

出　　处：《实验力学》2011年第1期21-25,共5页Journal of Experimental Mechanics

基　　金：国家自然科学基金(批准号:10627201;10732080;10472112和20674078)资助的课题

摘　　要：微悬臂梁传感技术是微纳传感技术研究的热点,仪器装置的研究也从单悬臂梁向微梁阵列的方向发展。本文针对间距为250μm的商品化微梁阵列,提出了一种实现对其弯曲变形的读出系统光路。利用高精度位移平台调节激光器空间位置,使光束实现微距离上平行,并分别照射在阵列梁的相邻微梁上。用位置敏感探测器对两个微悬臂梁尖端反射的激光信号进行检测,实现系统传感功能。实验验证该光路设计简单易行,针对这一方案实现了两个微梁的信号分离。在微梁上修饰对应的抗体,系统就可以对其抗原行检测。该方案对微梁多阵列传感器研制开发提出了一个新的思路。As an emerging hotspot of MEMS technology and NEMS sensor over past decades,the research of instrument style of micro-cantilever sensor was developed from single cantilever to one-dimensional or two-dimensional arrays.A new optical sequential readout for micro-cantilever array is presented in this paper,based on a commercialized micro-cantilever array with 250μm spacing.Using high precision two-dimensional optical displacement table to adjust the laser position and locate two laser beams on the adjacent micro-cantilever array tips as parallel beams on micro-distance,the bend of two micro-cantilevers was detected by PSD.Thus the system sensor function was realized.This optical path is easy put up in experiment verification and two signals from two micro-cantilevers can be better separated.When an antibody was immobilized on the surface of a micro-cantilever,the system can detect the antigen in solution.This method provided a simple way to design micro-cantilever array based on optical lever in the future.

关 键 词：微机电系统 微悬臂梁阵列 生化传感器 设计与实现 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置] TP212.3[自动化与计算机技术—控制科学与工程]