退火对Al掺杂ZnO薄膜结构和磁性的影响  

Annealing Effects on Structural and Magnetic Properties of Al-doped ZnO Thin Films

作　　者：岂云开[1,2,3] 顾建军[1,2,3] 刘力虎[1,2] 徐芹[1,2] 蔡宁[1,2] 孙会元[1,2] 

机构地区：[1]河北师范大学物理科学与信息工程学院,河北石家庄050016 [2]河北省新型薄膜材料重点实验室,河北石家庄050016 [3]河北民族师范学院物理系,河北承德067000

出　　处：《河北师范大学学报（自然科学版）》2011年第2期150-154,共5页Journal of Hebei Normal University：Natural Science

基　　金：河北省自然科学基金(A2009000254);河北师范大学博士基金(L2006B10);河北师范大学一般基金(L2009Y03);河北省新型薄膜材料重点实验室开放课题

摘　　要：采用直流磁控溅射法制备了Al掺杂ZnO薄膜,并在不同的氛围和温度下进行了退火处理.利用X射线衍射仪(XRD)和物理性能测量仪(PPMS)对薄膜的结构和磁性进行了表征.采用了一种改进的磁性修正方法对磁测量结果进行了修正.结果表明,不同的退火温度和氛围对薄膜的微结构和磁特性有着较大的影响,与真空退火处理的薄膜相比,空气退火处理的薄膜样品呈现了明显的铁磁性,磁矩约增加了一个数量级.室温铁磁性可能与Al和ZnO基体之间发生的电荷转移以及在不同退火氛围下Al在ZnO晶格中的地位变化有关.Al doped ZnO films have been prepared by dc magnetron sputtering. These fihns were annealed in different atmosphere and temperature. The crystal structures were analyzed by X-ray diffraction （XRD）, and the magnetic properties were measured by a physical properties measurement system （PPMS） with the magnetic field paralleled to the films plane. An improved magnetic corrected method was applied on the measurement data. The results show the microstructure and magnetic properties are influenced by annealing atmosphere. Compared with the fihns annealed in vacuum, the fihns annealed in air show obvious room temperature ferromagnetism, the magnetic moment increases about an order of magnitude. The room temperature ferromagnetism may be associated with a charge transfer between Al and Zn and the variational position of Al in ZnO films in different annealing ambience.

关 键 词：ZNO薄膜 磁性修正 铁磁性 退火氛围 

分 类 号：O482.54[一般工业技术—材料科学与工程]