ZnO纳米结构的CVD制备工艺及其应用  

Studies of ZnO Nanostructures Synthesized by CVD and Its Applications

作　　者：孟华[1] 梁建[1] 赵君芙[1] 赵国英[1] 

机构地区：[1]太原理工大学材料科学与工程学院,太原030024

出　　处：《材料导报》2011年第5期23-27,共5页Materials Reports

基　　金：山西省回国留学人员科研资助项目(2008-37);山西省回国留学人员重点资助项目(2009-03)

摘　　要：纳米结构的ZnO由于具有优异的光、电、磁、声等性能,已经成为光电、化学、催化、压电等领域中聚焦的研究热点之一。不同纳米结构的ZnO其制备方法不同,着重概述了采用化学气相沉积(CVD)工艺制备ZnO纳米材料,包括直接热分解、高温加热锌粉、碳热还原法以及金属有机气相沉积(MOCVD)4种方法,重点讨论了不同锌源和氧源对ZnO纳米结构的影响规律,并初步探讨了ZnO的VLS与VS生长机理,同时展望了ZnO在各领域中的最新应用。With excellent optical, electrical, magnetic, acoustic, and other properties, ZnO nanostructures have not only been attracting extensive attention, but also been newly developed in many areas such as photoelectriei- ty, chemistry, catalysis and piezoelectricity. Preparation methods for ZnO nano-material is different. Various ZnO nanostructures synthesized by chemical vapor deposition （CVD）, including direct thermal decomposition, high tempe- rature heating zinc powder, carbothermal reduction and metal organic chemical deposition（MOCVI））, using different zinc and oxygen sources are reviewed, and ZnO in the VLS and VS growth mechanisms are discussed, while ZnO in various fields of application and the latest outlook are briefly introduced.

关 键 词：ZNO纳米结构 CVD法 生成机理 应用 

分 类 号：TB383[一般工业技术—材料科学与工程]