基于坐标测量机的步距规激光校准系统  

Calibration system with laser for step gauge based on coordinate measuring machine

作　　者：姜志华[1] 魏勇[2] 

机构地区：[1]上海市计量测试技术研究院 [2]上海大学

出　　处：《上海计量测试》2010年第6期20-22,26,共4页Shanghai Measurement and Testing

摘　　要：该文介绍坐标测量机与激光干涉仪对步距规进行校准的测量原理和测量过程,测量结果与DKD证书进行对比,并分析测量结果的不确定度。Using coordinate measuring machine（CMM） and laser interferometer,a calibration system for step gauge is developed. Measuring principle and the measurement process are described in this paper.The results of the measurement are compared with the DKD certificate and the uncertainty analysis of the measurement results is presented.

关 键 词：步距规 坐标测量机 激光干涉仪 不确定度分析 

分 类 号：TH721[机械工程—仪器科学与技术]