基于MEMS可编程光栅检测甲烷的研究  

Study on Programmable Grating for Methane Detection Based on MEMS

作　　者：吕振[1] 董璞[1] 

机构地区：[1]辽宁工程技术大学电气与控制工程学院,辽宁葫芦岛125105

出　　处：《半导体光电》2011年第1期135-138,145,共5页Semiconductor Optoelectronics

基　　金：辽宁省高校创新团队项目(2007T074)

摘　　要：介绍了基于微电子机械系统(MEMS)技术的微型可编程光栅的光学特性。分析了可通过对可编程光栅编程状态的预先设定,使其衍射输出对应于不同目标物质的光谱。提出了一种全新的基于微型可编程光栅的相关光谱法检测甲烷的方法。实验表明,该方法不仅可对多种气体成分进行检测,而且有很高检测精度,并具备传统检测方法无法比拟的优点。The optical characteristics of micro programmable grating based on MEMS were introduced. It is analyzed that the state of the micro programmable grating can be prescribed, and the diffractive emergent light will correspond to the spectra of different target substances. A new method of correlation spectroscopy for methane detection based on micro programmable grating was proposed. The experimental results show that this method can be used to detect various kinds of gas ingredients with high precision.

关 键 词：MEMS 可编程光栅 模拟光谱 相关光谱 甲烷 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]