硅微机械陀螺自激驱动数字化技术  

Digital self-oscillation driving technology for silicon micro machined gyroscopes

作　　者：夏国明[1] 杨波[1] 王寿荣[1] 

机构地区：[1]东南大学微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096

出　　处：《光学精密工程》2011年第3期635-640,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60974116);航空科学基金资助项目(No.20090869007);新教师基金资助项目(No.200802861063);船舶工业国防预研基金资助项目(No.6922001045)

摘　　要：为了进一步增强硅微机械陀螺仪驱动模态的控制精度与稳定性,提出了一种基于自激振荡原理,以现场可编程门阵列(FPGA)为主要数字信号处理平台的驱动电路。以陀螺仪驱动模态特性为出发点,分析了自激振荡原理对驱动电路的要求。分析并建立了驱动相位控制与驱动幅度控制模型,实现了频率测量-补偿算法控制驱动环路相位,PID控制算法控制环路幅度。实验结果表明,常温下驱动幅度控制精度达到1.5×10-5,并且能跟踪驱动模态谐振频率。由于采用了数字电路使得驱动幅度温度系数由原来模拟电路方案的7.69×10-5/℃降低到1.183×10-5/℃。相比传统模拟电路控制方案,本方案具有驱动精度高,温度适应性好的优点。To further improve the performance and stability of the primary mode for a Silicon Micro Machined gyroscope, a new driving circuit based on the self-oscillation principle and controlled by Field Programming Gate Array（FPGA） digital signal processing was proposed. Based on the characters of the digital signal processing and the principle of self-oscillation, the models for the loop phase control and oscillation amplitude control were designed and analyzed,then the control methods in which the loop phase was controlled by ＇ frequency measure and adjust program＇ and the signal amplitude was controlled by ＇PID control program＇ were presented. Experimental results indicate that the precision of the oscillation amplitude is up to 1.5 × 10^-5 , and the driving frequency can follow the change of the primary mode resonant frequency. In addition, by introducing the digital signal control system, the thermal sensitivity of oscillation amplitude has improved from 7.69×10^-5/℃ to 1. 183×10^-5/℃. Compared with an analog circuit, this system has more precision amplitude and better temperature adaptation.

关 键 词：硅微机械陀螺 自激驱动 闭环控制 数字化电路 现场可编程门阵列 

分 类 号：U666.1[交通运输工程—船舶及航道工程]