基于数字全息显微成像的微光学元件三维面形检测  

3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy

作　　者：王云新[1,2] 王大勇[1,2] 赵洁[1,2] 李艳[1,2] 万玉红[1,2] 

机构地区：[1]北京工业大学应用数理学院,北京100124 [2]北京工业大学微纳信息光子技术研究所,北京100124

出　　处：《光学学报》2011年第4期109-114,共6页Acta Optica Sinica

基　　金：国家自然科学基金(61077004);北京市教育委员会科技发展计划重点项目;北京市自然科学基金重点项目(B类)(KZ200910005001);服务北京创新人才;团队建设项目;北京工业大学博士科研启动基金项目资助课题

摘　　要：针对微光学元件的三维面形检测,提出了利用数字全息显微(DHM)方法实现全视场、非接触式和非破坏性的快速三维定量相衬成像。首先构建了无透镜傅里叶变换数字全息装置,通过对获取的全息图进行单次快速傅里叶逆变换实现数值再现,然后采用两步相位相减法校正相位畸变,利用最小二乘法获得解包裹相位图,进而给出测试样本的面形信息。实验中,对微透镜阵列进行了形貌检测,得到其口径和浮雕深度分别为1.595mm和2.424μm,这与采用白光干涉仪获得的结果具有较好的一致性,表明无透镜傅里叶变换数字全息显微术应用于微光学元件面形成像是可行和有效的。Digital holographic microscopy（DHM） is proposed for the three-dimensional（3D） profile measurement of the micro-optical components,which is characterized by its non-invasion,non-contact,high-speed,and full-wave field scheme.Firstly,the configuration of lensless Fourier-transform DHM is designed and built.The complex amplitude of the full-wave field is reconstructed by a single inverse fast Fourier transform only.The phase aberration is corrected by the two-step phase subtraction method,and the unwrapped phase information is extracted by using the least-squares phase-unwrapping algorithm.Then the profile information of the sample can be obtained.In the experiments,the profile of the micro-lens arrays is measured by the proposed configuration,and the results show that the caliber and relief depth are 1.595 mm and 2.424 μm respectively.These are in good agreement with the results given by the white-light interferometer.It demonstrates that the lensless Fourier-transform DHM is feasible and effective for the 3D profile measurement of the micro-optical components.

关 键 词：全息术 无透镜傅里叶变换全息 相衬成像 三维成像 微光学元件 

分 类 号：O438.1[机械工程—光学工程]