流延成膜技术制备高性能多层片式压电陶瓷微驱动器研究  

HIGH_PERFORMANCE OF MONOLITHIC MULTILAYER PIEZOELECTRIC ACTUATOR FABRICATED BY THE TAPE_CASTING TECHNOLOGY

作　　者：李国荣[1] 陈大任[1] 张望重[1] 张申[1] 沈卫[1] 殷庆瑞[1] 

机构地区：[1]中国科学院上海硅酸盐研究所无机功能材料开放实验室

出　　处：《硅酸盐学报》1999年第5期533-539,共7页Journal of The Chinese Ceramic Society

基　　金：上海市科学技术发展基金;上海青年科技启明星计划

摘　　要：采用压电陶瓷流延厚膜成型技术以及厚膜与金属内电极共烧技术制备了逆压电效应下工作的多层片式压电陶瓷微位移驱动器． 该器件具有工作电压低、功耗小、响应快、器件尺寸微小型化等特点，适合于微电子及微型机械应用．本课题对该器件与应用密切相关的位移－ 电压关系及位移蠕变性能、驱动力和使用寿命等性能进行测试和研究．PZT_based monolithic multilayer piezoelectric actuator with 35 piezoelectric layers, 47 μm in thickness of each layer, was fabricated by the tape_casting and the ceramic/internal electrode cofiring technology. This actuator has a low working voltage, less power consumption, large displacement and high response, small size and is suitable for the micro_electron and the micro_mechanical application. In this paper the properties of the electric field induced displacement characterization, rupture, driving force and displacement fatigue are given and discussed on the basis of the piezoelectric converse effect, 90° domain switching, and the high internal stresses on the interface of ceramics/internal electrode caused by the thermal mismatching,poling process and working voltage.

关 键 词：流延技术 结构 压电陶瓷 微位移驱动器 性能 

分 类 号：TM282.051[一般工业技术—材料科学与工程] TP640.5[电气工程—电工理论与新技术]