A sequence pulse counting method for shape measurement in dual-beam speckle interferometry  

作　　者：LIU Liang LI XiDe 

机构地区：[1]Department of Engineering Mechanics, Key Laboratory of Applied Mechanics, Tsinghua University, Beijing 100084, China

出　　处：《Science China(Physics,Mechanics & Astronomy)》2011年第4期640-646,共7页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grants Nos. 10972113,10732080);the National Basic Research Program of China(Grant Nos. 2007CB936803,2010CB631005);SRFDP(Grant No. 20070003053)

摘　　要：A temporal approach to fast shape measurement is presented.In principle,the rotational object method is used in combination with the sequence pulse counting method (SPCM) to determine the height of the object through calculating the related phase.Two specimens are tested to demonstrate the validity of the approach.One is an object covered by a Chinese character (tea) with a height variety of 0.3 mm,and the other is an object surface with a relatively large fluctuation of 3.5 mm.The experimental results are compared with mechanical measurements.An axis shifting method is also proposed to determine shapes with relatively large fluctuations.Effects of such parameters on the height measurement as incident angle of the dual light beams,tilting angle of the object,and azimuth angle of the measured point are discussed as well.A temporal approach to fast shape measurement is presented. In principle, the rotational object method is used in combination with the sequence pulse counting method （SPCM） to determine the height of the object through calculating the related phase. Two specimens are tested to demonstrate the validity of the approach. One is an object covered by a Chinese character （tea） with a height variety of 0.3 mm, and the other is an object surface with a relatively large fluctuation of 3.5 mm. The experi- mental results are compared with mechanical measurements. An axis shifting method is also proposed to determine shapes with relatively large fluctuations. Effects of such parameters on the height measurement as incident angle of the dual light beams, tilting angle of the object, and azimuth angle of the measured point are discussed as well.

关 键 词：shape measurement profilometry temporal speckle pattern interferometry phase measurement 

分 类 号：TQ085.1[化学工程] TS914.211[轻工技术与工程]