δ-函数在离子溅射热峰效应中的应用  

THE APPLICATION OF δ FUNCTION FOR THE THERMAL SPIKES EFFECT IN ION SPUTTERING

作　　者：陈慧力[1] 陈慧凯[2] 

机构地区：[1]济南教育学院数学系,济南250001 [2]山东工业大学电子工程系,济南250061

出　　处：《山东工业大学学报》1999年第3期241-245,共5页

摘　　要：热峰效应发生在离子束注入及激光表面材料处理过程中．引进了δ函数来描述热峰在离子溅射中的效应，从经典的热传导方程出发，对球形热峰效应及圆柱形热峰效应作了特别讨论。The thermal spikes effect occurs during the process of the ionic beam injection and the laser surface material treatment. The δ function has been introduced to discribe the thermal spikes effect in ion sputtering. The spherical and cylindrcal thermal spikes effects have specially been discussed based on the classical equation of thermal conduction. We have discovered that the thermal spikes of various forms may cause the non linear effects of various degrees during the process of material treatment.

关 键 词：热峰 离子注入 δ-函数 材料表面处理 

分 类 号：TG156.8[金属学及工艺—热处理]