压电梁弯曲振动方程及等效体力的计算  

Flexure Vibration Equation of Piezoelectric Beam and Calculation of Equivalent Volume Force

作　　者：贾玉斌[1] 孙雨南[1] 秦秉坤[1] 印平[2] 

机构地区：[1]北京理工大学光电工程系,北京100081 [2]北京联合大学专业基础部,北京100101

出　　处：《北京理工大学学报》1999年第5期599-603,共5页Transactions of Beijing Institute of Technology

摘　　要：目的　为研究石英音叉型角速率传感器提供设计参数方法　根据压电理论和弹性力学理论,讨论石英晶体振梁不同方向(光轴z和电轴x)振动的弹性柔顺常数存在的差别,导出压电梁弯曲振动的微分方程,并利用有限差分方法对几种典型的电极图形进行数值计算结果与结论　提出等效体力概念,给出了压电梁等效体力计算的一般公式,优选了振梁型传感器的电极图形。Aim To provide the design parameter for the development of quartz angular rate sensor. Methods Based on piezoelectric theory and elastic mechanics theory, intrinsic differences between two vibrations in the x direction and the z direction were discussed for quartz crystal vibration beam, and the differential equation of the flexural vibration of piezoelectric beam was derived. Numerical calculations were performed for several typical electrode configurations. Results and Conclusion The concept of equivalent volume force was presented, and a general formula is given for it. Optimum electrode configurations were chosen, and the side ratio of the piezoelectric beam was also determined.

关 键 词：等效体力 振梁型传感器 压电梁振动 弯曲振动 

分 类 号：TN384[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]