Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sens...
A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open lo...