多线切割机走线系统的张力控制  

Tension Control of Wire-traveling System for Multi-wire Saw

作　　者：蒋近[1,2] 戴瑜兴[1] 郜克存[1] 彭思齐[1] 

机构地区：[1]湖南大学电气与信息工程学院,长沙410082 [2]湘潭大学信息工程学院,湘潭411105

出　　处：《机械工程学报》2011年第5期183-187,共5页Journal of Mechanical Engineering

基　　金：国家发改委(发改投资[2009]1168号);国家科技重大专项(2009ZX02011-002);湖南省重点科技计划(2009CK2005)资助项目

摘　　要：随着集成电路和光伏产业的飞速发展,硅材料加工技术越来越受到重视,其中切割是硅材料加工的一道关键工序。介绍多线切割机走线系统的总体结构,说明它的工作原理,建立放线系统张力控制结构的运动学方程,分析产生张力波动的原因,提出相应的解决方法。设计张力控制系统的硬件平台,通过多电动机同步控制进行间接张力控制,提出一种基于相邻轴误差的多电动机同步控制方法,定义多电动机系统的跟踪误差和同步误差,引入相邻轴误差的概念,构造积分滑模面,设计控制转矩,保证多电动机的同步运动,减小张力的波动,保证钢丝线的张力稳定。试验结果表明所提出的张力控制方法十分有效,该张力控制系统具有张力波动范围小、控制精度高、调整方便的优点。With rapid development of integrate circuit and photovoltaic industry,silicon material processing technology is becoming more and more appreciated.Especially slicing is a key procedure in silicon material processing.Overall structure of wire-traveling system for multi-wire saw is introduced and its working principle is explained.The kinematics equation of tension control structure for pay-off system is established.The reasons for tension fluctuation are analyzed,and corresponding solution is proposed.After a hardware platform of tension control system is built,indirect tension control is carried out through multi-motor synchronization control.A multi-motor synchronization control method is proposed on the basis of adjacent axis error through definition of tracking error and synchronization error.The integral sliding mode surface is defined for designing control torque,and multi-motor synchronization motion is guaranteed,tension fluctuation is reduced and tension stability is ensured.Experimental results show that the proposed tension control method is very effective.This tension control system has the merits of small tension fluctuation range,high-precision control and convenient adjustment.

关 键 词：多线切割机 走线系统 张力控制 多电动机同步控制 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]