固定流导法真空漏孔校准装置性能研究  

STUDY ON PROPERTY OF CALIBRATING VACAUUM LEAK DEVICE WITH CONSTANT CONDUCTANCE METHOD

作　　者：刘波 丁立莉 

机构地区：[1]西安航天计量测试研究所,陕西西安710100

出　　处：《真空与低温》2011年第1期48-52,共5页Vacuum and Cryogenics

摘　　要：固定流导法是通过已知流导小孔的气体与真空漏孔流出的气体用四极质谱计进行比较,从而得到漏孔漏率的一种极为精确的方法。小孔是采用机械、激光等方法加工制成,在分子流条件下,小孔流导为一常数。运用此方法,建立了一套真空检漏校准装置以进行量值传递工作。为了保证校准数据的准确可靠性,需对该套装置的不确定度进行分析与评定。Constant conductance method uses quardrupole mass spectrometer to compare the known gas out of conduction orifice with gas from vacuum leak,It is a very precise method to deal with leak rate.Orifice is the use of machinery,laser processing method for producing,In the molecular flow conditions,the orifice conductance is a constant.Use this method for calibration data,we found a standard vacuum leak detection.To ensure the credibility of calibration data,the uncertainties of calibration system should be precisely estimated.

关 键 词：固定流导法 真空漏孔校准 不确定度分析 稳定性 重复性 

分 类 号：TB77[一般工业技术—真空技术]