高频线圈坡面对生长FZ单晶的影响  

The Role of High-frequency Coil Slope on the Growth of FZ Silicon Crystal

作　　者：董军恒[1] 刘洪飞[1] 

机构地区：[1]中国电子科技集团公司第四十六研究所,天津300220

出　　处：《电子工业专用设备》2011年第4期25-28,共4页Equipment for Electronic Products Manufacturing

摘　　要：通过对高频线圈下坡面对生长FZ单晶的作用,分析了不同坡面线圈的磁力分布,以及磁力在单晶生长过程中的作用。线圈下面坡度的大小,会产生分布不同的磁力,在FZ单晶生长时,磁力对固液交界面的外边缘有重要的影响。分析认为采用下坡度合适的加热线圈,可以有利于单晶的顺利生长,提高单晶的成功率。By analyzeing the role of the high-frequency coil slope on FZ growing system,this paper studies the magnetic distribution of different slope coil and the effect of magnetic on crystal growth process.Different slope size under the coil will lead to different distribution magnetic force.in the crystal growth,the magnetic force have an important impact on the outer edges of the solid-liquid interface.This article concludes that proper slope under the heating coil will be benefit for crystal growth and improve the ratio of crystals growth.

关 键 词：FZ单晶 高频线圈 磁力 

分 类 号：TN305.1[电子电信—物理电子学]