碳/碳复合材料应用于直拉硅单晶生长的研究  

The Research of the Carbon-Graphite Materials Using for the CZ Crystal Growth

作　　者：王世援[1] 韩焕鹏[1] 刘锋[1] 

机构地区：[1]中国电子科技集团公司第四十六研究所,天津300220

出　　处：《电子工业专用设备》2011年第4期29-33,共5页Equipment for Electronic Products Manufacturing

摘　　要：介绍了热系统在直拉硅单晶中的作用,对比了石墨与碳/碳复合材料的生产过程和性能特点与差异。通过在单晶炉上的实验应用,证明了碳/碳复合材料比石墨材料具有更好的实际应用效果,在直拉硅单晶领域具有很好的应用潜力。分析了碳/碳复合材料的一些不足,并提出了相应的解决方案。This paper describe the effect of hot zone in the CZ crystal growth,analyse then compare the characters and differents of the making process between Graphite Material and Carbon-Graphite Material.with the results of the experiment in using both materials in the growth of CZ crystal growth,certify that the Carbon-Graphite Materials have better effect than the Graphite Material,so the Carbon-Graphite Material should be a very potential material in the region of CZ products growth.The last but not least,analyse and indicate some shotage of the Carbon-Graphite Materials the advice the solutions.

关 键 词：碳/碳复合材料 直拉单晶炉 热系统保温装置 

分 类 号：TN304.053[电子电信—物理电子学]