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出 处:《兵器材料科学与工程》2011年第2期31-34,共4页Ordnance Material Science and Engineering
基 金:原国防科工委资助项目(JPPT-115-2-893)
摘 要:采用直流磁控溅射法在空芯玻璃微球表面镀Al膜,将空芯玻璃微球、镀Al膜玻璃微球和高分子粘合剂按一定比例混合制成人工介质材料。用波导法测量人工介质材料的介电常数,并采用有效媒质理论对测试结果进行分析。结果表明,在8~12 GHz频率范围内,人工介质材料的介电常数随镀Al膜玻璃微球含量的增加而增加,其介电常数在2~5范围内可调。再经热处理工艺优化,人工介质材料的介电损耗正切值可降至0.015以下。DC magnetron sputtering was employed to sputter Al on the surface of hollow glass microspheres.The artificial dielectric materials were prepared with the hollow glass microspheres coated and uncoated with Al,as well as the polymer binder,which were mixed according to a certain proportion.The dielectric constant was measured by waveguide method,and the dielectric property of the artificial dielectric materials was analyzed with the effective medium theory.The results show that within the frequency of 8-12 GHz,the dielectric constant of the artificial material is between 2 to 5,and increases with the addition amount of the Al coated microspheres.The dielectric properties of artificial dielectric materials can be improved by heat treatment process.Meanwhile,the tangent value of dielectric loss of the artificial dielectric materials decreases to less than 0.015.
关 键 词:直流磁控溅射法 空芯玻璃微球 介电常数 介电损耗
分 类 号:TB333[一般工业技术—材料科学与工程] TB34
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