改进型振动轮式硅微机械陀螺仪的研究  

Research on Improved Vibrating Wheel Micromechanical Gyroscope

作　　者：周顺 张燕娥 

机构地区：东南大学仪器科学与工程系

出　　处：《东南大学学报（自然科学版）》1999年第4期30-33,共4页Journal of Southeast University：Natural Science Edition

基　　金：国防科技预研资助

摘　　要：以Ｗ．Ｇｅｉｇｅｒ提出的改进型振动轮式微机械陀螺仪为研究对象，分析了结构参数其性能之间的内在联系，探讨了重力极及静电服力对它螺仪工作性能的影响，并以此为依据，提出音叉式驱动器叉指结构最佳间距的设计准则。This paper introduces a improved vibrating wheel micromechanical gyroscope designed by W.Geiger. Such a gyroscope has the advantages of simple fabrication and large output characteristics compared with other gyroscopes. The relation between structure and performances of the improved gyroscope is thoroughly studied. This paper analyses the influence of the navigation and electrostatic comb drive levitation to the gyro’s performances. Finally the optimal displacement of its comb drive electrodes is given.

关 键 词：微机械陀螺仪 梳状电极驱动 振动轮式 硅 悬浮力 

分 类 号：U666.123[交通运输工程—船舶及航道工程] V241.5[交通运输工程—船舶与海洋工程]