光纤阵列中纤芯间距的检测系统  

Detection system for distances between the fiber centers in fiber array

作　　者：陈立国[1] 朱吉锋[1] 王明月[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,黑龙江哈尔滨150001

出　　处：《红外与激光工程》2011年第4期728-732,共5页Infrared and Laser Engineering

基　　金：国家863计划(2006AA04Z256);国家自然科学基金(60605025)

摘　　要：在光通讯器件中,由光纤阵列和光波导封装而成的光波导分路器芯片,有着广泛的应用。光纤阵列与光波导封装的关键技术在于实现光纤阵列与光波导的低损耗耦合。然而,光纤阵列中纤芯分布的均匀性将会直接影响到耦合的性能,因此,需要对光纤阵列的纤芯分布进行检测,以选择分布均匀的阵列用于和光波导的耦合。系统利用显微视觉和纳米微驱动平台搭建硬件平台,利用最小二乘算法和亚像素图像处理技术提取纤芯的中心,实现纤芯间距的在线检测,纤芯间距的检测精度为50 nm。实验验证了该系统能提高测量的效率和精度,具有很强的实际应用价值。Among the optical communication components,the planar lightwave circuit（PLC） splitter which is packed by fiber array and array waveguide is widely used.Low-loss couple between fiber array and array waveguide is the key technology in package.However,the uniformity of the distances distribution among the fiber centers in fiber array will have a direct impact on the performance of the coupling,so the distribution uniformity about fiber centers were detected,and then the array with a better uniformity was used to couple with waveguide.Microscopic vision and nano-scale micro driving system were used to build the hardware platform,the least-squares algorithm and sub-pixel image processing technology were adopted to extract the fiber centers and the detection of the distance on-line was realized.The accuracy of detecting distance between the fiber centers is 50 nm.The experiment shows that the system enhances the measuring efficiency and accuracy and possesses vital practical value.

关 键 词：光纤阵列 显微视觉 最小二乘法 亚像素 

分 类 号：TN253[电子电信—物理电子学]