热丝辐射距离与甲烷浓度对CVD金刚石薄膜的影响  

Effects of radiation distance of hot-filament and methane concentration on diamond films

作　　者：魏秋平[1,2] 田孟昆[1] 马莉[2] 陈中[1] 刘培植[1] 余志明[1] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中南大学粉末冶金国家重点实验室,长沙410083

出　　处：《粉末冶金材料科学与工程》2011年第2期187-195,共9页Materials Science and Engineering of Powder Metallurgy

基　　金：粉末冶金国家重点实验室开放基金资助项目(2008112048);湖南省研究生创新基金资助项目(1343-74236000005);中南大学贵重仪器开放共享基金资助项目(ZKJ2008001);中南大学优秀博士论文扶持基金资助项目(2008yb015)

摘　　要：以H2和CH4作为反应气体,采用热丝化学气相沉积法(Hot filaments chemical vapor deposition,HFCVD),在WC-3%Co条状平板上制备金刚石薄膜,利用扫描电镜(SEM)、X射线衍射(XRD)、激光拉曼光谱(Raman)和洛氏硬度仪分析薄膜的形貌、结构、成分和附着性能,研究热丝辐射距离和反应气体中甲烷的体积分数对金刚石薄膜的影响。结果表明:热丝辐射距离和甲烷体积分数增加会使薄膜中金刚石相(sp3杂化)减少,且热丝辐射距离和甲烷体积分数显著影响薄膜中sp2杂化碳相的种类和含量。当热丝辐射距离约为9～13 mm时,薄膜的成分和结构受热丝辐射距离变化的影响较小;而在热丝辐射距离在13～17 mm范围内时,薄膜的成分和结构受热丝辐射距离的影响较大。压痕测试表明在WC-3%Co硬质合金基体上沉积的金刚石薄膜与基体的附着性能良好。Diamond films were deposited on WC-3%Co substrates with different methane volume fraction by hot filaments chemical vapor deposition（HFCVD）.The effects of the radiation distance of hot-filament and methane volume fraction on the morphology,structure and composition of diamond films grown by HFCVD and the adhesion of such films to substrate were studied.The surface and cross-section morphology of diamond films were observed by SEM,the structure of films was investigated using Laser Raman spectrum,and the adhesion of diamond film was characterized by Rockwell hardness tester.The results show that the content of sp3 phase decreases with increasing the methane volume fraction or the radiation distance of hot-filament,and the species and the content of sp2 phases strongly depend on the methane volume fraction and the radiation distance of hot-filament;the structures and the composition of diamond films change more remarkably at the hot-filaments radiation distances from 13 to 17 mm than that of from 9 to 13 mm,the Rockwell indentation test results show that the adhesion of diamond films to WC-3%Co cemented carbide is prominent.

关 键 词：金刚石薄膜 甲烷体积分数 热丝辐射距离 拉曼光谱 热丝化学气相沉积 

分 类 号：TB43[一般工业技术]