Trace-Rare-Gas Optical Emission Spectroscopy of Nitrogen Plasma Generated at a Frequency of 13.56 MHz  

作　　者：N.U.REHMAN F.U.KHAN S.NASEER G.MURTAZA S.S.HUSSAIN I.AHMAD M.ZAKAULLAH 

机构地区：[1]Department of Physics, COMSATS Institute of Information Technology [2]Department of Physics, Gomal University [3]Department of Physics, Peshawar University [4]Department of Physics, Quaid-i-Azam University

出　　处：《Plasma Science and Technology》2011年第2期208-212,共5页等离子体科学和技术（英文版）

基　　金：supported by the Higher Education Commission (HEC) of Pakistan. G. MURTAZA and S.S. HUSSAIN;the financial support of HEC in their doctoral studies

摘　　要：Optical emission spectroscopic measurement of trace rare gas is carried out to determine the density of nitrogen （N） atom, in a nitrogen plasma, as a function of filling pressure and RF power applied. 2% of argon, used as an actinometer, is mixed with nitrogen. In order to normalize the changes in the excitation cross section and electron energy distribution function at different operational conditions, the Ar-I emission line at 419.83 nm is used, which is of nearly the same excitation efficiency coefficient as that of the nitrogen emission line at 493.51 nm. It is observed that the emission intensity of the selected argon and atomic nitrogen lines increases with both pressure and RF power, as does the nitrogen atomic density.Optical emission spectroscopic measurement of trace rare gas is carried out to determine the density of nitrogen （N） atom, in a nitrogen plasma, as a function of filling pressure and RF power applied. 2% of argon, used as an actinometer, is mixed with nitrogen. In order to normalize the changes in the excitation cross section and electron energy distribution function at different operational conditions, the Ar-I emission line at 419.83 nm is used, which is of nearly the same excitation efficiency coefficient as that of the nitrogen emission line at 493.51 nm. It is observed that the emission intensity of the selected argon and atomic nitrogen lines increases with both pressure and RF power, as does the nitrogen atomic density.

关 键 词：optical actinometry N atomic density EEDF RF plasma 

分 类 号：TH744.1[机械工程—光学工程]