EEDF

作品数:15被引量:20H指数:2
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相关领域:理学更多>>
相关作者:陈会利徐建源林莘王小敏夏蒙重更多>>
相关机构:沈阳工业大学电子科技大学更多>>
相关期刊:《Chinese Physics C》《高压电器》《Chinese Physics B》《Optics and Photonics Journal》更多>>
相关基金:国家自然科学基金国家重点基础研究发展计划中国博士后科学基金更多>>
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Laboratory observation of electron energy distribution near three-dimensional magnetic nulls被引量:1
《Plasma Science and Technology》2024年第3期46-52,共7页何任川 徐田超 杨肖易 肖池阶 张祖煜 袁瑞鑫 王晓钢 郭志彬 余修铭 盖跃 
supported by National Natural Science Foundation of China(No.11975038);the National Key Research and Development Program of China(No.2022YFA1604600)。
The acceleration of electrons near three-dimensional(3D)magnetic nulls is crucial to the energy conversion mechanism in the 3D magnetic reconnection process.To explore electron acceleration in a 3D magnetic null topol...
关键词:electron acceleration EEDF 3D magnetic null magnetic reconnection 
Automated electron temperature fitting of Langmuir probeⅠ-Ⅴtrace in plasmas with multiple Maxwellian EEDFs
《Plasma Science and Technology》2020年第8期109-119,共11页Chi-Shung YIP Wei ZHANG Guosheng XU Noah HERSHKOWITZ 
This work is supported by the Chinese Academy of Science Hundred Youth Talent Program Start-up Funding,CAS Key Research Program of Frontier Sciences(No.QYZDB-SSW-SLH001);National Natural Science Foundation of China(Nos.11875285,11575248 and 11505220);well as US National Science Foundation Award(No.1804654).
An algorithm for automated fitting of the effective electron temperature from a planar Langmuir probe I-V trace taken in a plasma with multiple Maxwellian electron populations is developed through MATLAB coding.The co...
关键词:EEDF LANGMUIR probes plasma DIAGNOSTICS 
Correlation ofⅢ/Ⅴsemiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance
《Plasma Science and Technology》2017年第12期96-110,共15页Gerhard FRANZ Ralf MEYER Markus-Christian AMANN 
the support of Deutsche Forschungsgemeinschaft,DFG#FR 1553/6-1
Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclo...
关键词:electron cyclotron resonance high-density plasma Langmuir probe EEDF radial plasma density radial uniformity 
Influence of the gassing materials on the dielectric properties of air被引量:2
《Plasma Science and Technology》2017年第5期68-73,共6页张含天 厉天威 罗兵 吴翊 杨飞 孙昊 唐力 
supported by the National Key Basic Research Program of China(973 Program)2015CB251002;National Natural Science Foundation of China under Grant 51521065,51577145;the Fundamental Research Funds for the Central Universities;Shaanxi Province Natural Science Foundation 2013JM-7010
Influence of the gassing materials, such as PA6, PMMA, and POM on the dielectric properties of air are investigated. In this work, the fundamental electron collision cross section data were carefully selected and vali...
关键词:air circuit breaker gassing materials Boltzmann equation analysis dielectric properties EEDF critical reduced electric field strength electron collision cross section 
SF_6/N_2和SF_6/CF_4混合气体放电参数计算分析被引量:11
《高压电器》2016年第12期60-65,共6页李璐维 林莘 徐建源 陈会利 
国家自然科学基金项目(51277123);国网辽宁省电力有限公司科技项目(2015YF-62)~~
为研究SF_6混合气体的放电参数特性,文中通过两项近似求解Boltzmann方程得到温度为300 K,不同混合比下SF_6/N_2、SF_6/CF_4的电子能量分布函数(EEDF)、折合电离系数α/N、折合吸附系数η/N和折合有效电离系数(α-η)/N,与其他文献结果对...
关键词:B0ltzmann方程 电子能量分布函数(EEDF) 折合电离系数α/N 折合吸附系数η/N 
Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH_4/Ar Discharge
《Plasma Science and Technology》2016年第4期394-399,共6页王喜凤 宋远红 赵书霞 戴忠玲 王友年 
supported by National Natural Science Foundation of China(No.11275038)
A one-dimensional fluid/Monte-Carlo(MC)hybrid model is developed to describe capacitively coupled SiH_4/Ar discharge,in which the lower electrode is applied by a RF source and pulse modulated by a square-wave,to inv...
关键词:hybrid model EEDF pulse modulation SiH_4/Ar mixture 
Electron Transport Coefficients and Effective Ionization Coefficients in SF_6-O_2 and SF_6-Air Mixtures Using Boltzmann Analysis被引量:1
《Plasma Science and Technology》2014年第10期941-947,共7页魏林生 徐敏 袁定琨 章亚芳 胡兆吉 谭志洪 
supported by National Natural Science Foundation of China(Nos.11105067 and 51366012);Jiangxi Province Young Scientists(Jinggang Star)Cultivation Plan of China(No.2013BCB23008)
The electron drift velocity, electron energy distribution function (EEDF), densitynormalized effective ionization coefficient and density-normalized longitudinal diffusion velocity are calculated in SF6-O2 and SFs-A...
关键词:effective ionization coefficient drift velocity EEDF longitudinal diffusion velocity 
Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe被引量:3
《Plasma Science and Technology》2014年第9期837-842,共6页Djelloul MENDIL Hadj LAHMAR Laifa BOUFENDI 
An RF compensated cylindrical Langmuir probe system has been developed and used to characterize an RF capacitive two temperature plasma discharge in a stochastic mode. The novelty of the work presented here is the use...
关键词:RF capacitive discharge Langmuir probe EEDF stochastic mode PECVD 
Studies of Electron Energy Distribution Function (EEDF) in Lithium Vapor Excitation at 2S→3D Two-Photon Resonance
《Optics and Photonics Journal》2014年第8期195-212,共18页Mohamed A. Mahmoud Kholoud A. Hamam 
We have developed a computational model which quantitatively studies the Electron Energy Distribution Function (EEDF) in laser excited lithium vapor at 2s→3d two-photon resonance. A kinetic model has been constructed...
关键词:Two-Photon Resonance EXCITATION Laser LITHIUM COLLISIONAL Ionization ENERGY Pooling PHOTOIONIZATION Electron ENERGY Distribution Function 
Three-dimensional particle-in-cell with Monte Carlo collision simulation of the electron energy distribution function in the multi-cusp ion source for proton therapy
《Chinese Physics C》2012年第10期1013-1018,共6页杨超 吴小兵 刘大刚 
For optimization and accurate prediction of the amount of proton production in the multi-cusp ion source, analysis of the electron energy distribution function (EEDF) is necessary. A three dimensional particlein-cel...
关键词:multi-cusp proton source EEDF PIC-MCC 
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