微小型齿轮加工技术  

Manufacturing Technology of Micro Gear

作　　者：石文天[1] 刘玉德[1] 方泽平[2] 李银宾[3] 

机构地区：[1]北京工商大学机械工程学院,北京100048 [2]北京理工大学先进加工技术国防重点学科实验室,北京100081 [3]青岛港湾职业技术学院,山东青岛266404

出　　处：《机械传动》2011年第5期72-75,共4页Journal of Mechanical Transmission

基　　金：国家自然科学基金资助项目(50875026);北京工商大学青年教师科研启动基金资助项目;北京市属高等学校人才强教计划资助项目(PHR201106110)

摘　　要：微小型齿轮是微机电系统的主要零部件,其加工工艺是微机电系统的重要技术。总结并分析了微小型齿轮加工的各种工艺方法,包括LIGA和准LIGA、WEDM工艺、微塑性成形、微刻蚀加工、微细切削加工等方法,介绍了各种方法加工微小型齿轮的研究成果,并指出了其适用范围及优缺点。微细切削微小型齿轮的加工技术又分为微细成形铣削和微细滚削加工,对应齿轮的仿形加工和范成加工方法,与其他加工方法相比,微细切削尤其是微齿轮的滚削加工,具有加工精度高、效率高、成本低、材料适用范围广等优点,更易实现零件批量柔性化的需求。Micro gear is an important part and the processing technology of micro gear is the key in MEMS.The manufacturing technology of micro gear including LIGA and quasi-LIGA,WEDM,micro plastic forming,micro etching method,micro cutting technology etc is presented.The result of micro gear processed by the technology is introduced and the advantage and shortcoming of the technology is analyzed.Micro cutting in forming micro gear is divided into the two ways such as micro forming milling and micro hobbing technology.Micro forming milling is a forming technology and micro hobbing is a generating method in processing micro gear.Contrasted with the other technology,the generating method used in hobbing process is better than the other methods because of the high quality,low cost,high efficiency,and can adopt with many kind of material of micro gear.Micro hobbing process is a good technology for the flexible batch processing of micro gear.

关 键 词：微小型齿轮 微细切削 微小型加工工艺 成形铣削 滚齿加工 

分 类 号：TG61[金属学及工艺—金属切削加工及机床]