激光扫描测头对金属曲面测量研究  

Research on Metallic Surface Measurement with Laser Scanning Probe

作　　者：张良[1] 费致根[1] 郭俊杰[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710054

出　　处：《机床与液压》2011年第9期12-15,共4页Machine Tool & Hydraulics

基　　金：中国工程物理研究院激光研究中心国防专项基金资助项目

摘　　要：利用激光扫描测头对镜面反射很强的金属曲面进行轮廓测量,是目前形貌测量领域的一个难点。分析了现有的几种激光测头的工作原理并比较了其对金属表面的测量能力。通过构建斜射式三角测头的测量模型,分析系统误差产生的原因并给出补偿算法。对标准球进行测量,实验结果表明该补偿算法的可行性与有效性。Measuring high-reflective metallic surface with laser scanning probe is one of the most challenging technologies in dimensional measurements.The working principles of several kinds of laser probes were illustrated and their measuring properties on metal surface were compared.Based on the mathematical model of oblique incidence triangulation probe,the systematic error of the probe was analyzed,and corresponding compensation method was presented.By means of detecting the standard ball,the experimental result shows that the compensation method is feasible and valid.

关 键 词：激光扫描 金属曲面 激光三角法 误差补偿 

分 类 号：TH741[机械工程—光学工程]