数字掩模灰度细分技术研究  

Research on gray subdivision technology of digital mask

作　　者：陈劲松[1] 

机构地区：[1]安徽财经大学电子信息工程系,安徽蚌埠233000

出　　处：《激光与红外》2011年第5期569-572,共4页Laser & Infrared

摘　　要：数字掩模技术是一种很有发展前途的衍射微光学元件制作技术。实际制作时,由于感光材料具有感光非线性,实际可利用的灰度数目将小于256。即使256级灰度全部可用,也无法实现曝光量的精细控制以达到一般的加工要求。文中提出了2种灰度细分的方法,即多SLM组合调制和彩色等效灰度技术。从理论上分析了2种方法均能实现灰度的细分,从而达到曝光量的精细控制。Digital mask technology is a method with good prospect that manufacture diffractive optical element.While diffractive optical element is made,the number of gray level that can be used will be less than 256 due to sensitive nonlinearity of photosensitive material.Even if 256 gray grades can be used entirely,fine control that obtains general processing demand will not be realized.In the paper,two methods of gray subdivision and expansion are put forward.They are assembled modulation by many SLMs and color-equivalent-gray technology.It is analyzed theoretically that two methods both can realize gray subdivision,which can result in elaborate control of light exposure.

关 键 词：数字掩模 空间光调制器 灰度细分 

分 类 号：TN249[电子电信—物理电子学]