化学液相沉积制备PbSe薄膜生长过程及其性能研究  

Study of Deposition Process and Properties of PbSe Films Grown by Chemical Liquid Deposition

作　　者：罗飞[1] 王锦鹏[1] 陶春虎[1] 李志[1] 刘大博[1] 

机构地区：[1]北京航空材料研究院,北京100095

出　　处：《航空材料学报》2011年第2期33-36,共4页Journal of Aeronautical Materials

摘　　要：采用化学液相沉积方法在醋酸铅溶液体系中制备了厚度在微米量级的PbSe薄膜,通过扫描电镜、X射线衍射和红外光谱分析等测试手段研究了PbSe薄膜的生长过程以及沉积时间对薄膜相结构、表面形貌和红外透光性能的影响。研究结果表明:随着沉积时间的增加,薄膜致密度增大,Se/Pb原子比增加,都为表面富Se的PbSe薄膜;在不同沉积时间下薄膜都为完全晶化的立方结构,各衍射峰清晰;薄膜厚度对其光学性质也有影响,随着沉积时间增加薄膜红外吸光度增大。Chemical liquid deposition of PbSe semiconductor thin films in solutions of lead acetate were carried out.The effects of deposition time on the crystal structure,morphology and optical properties were investigated by XRD,SEM and Optical Transmittance Spectra.It revealed that highly crystallized PbSe films grew at different deposition time with cube structure.With increasing of deposition time,films turn compact and Pb/Se atom ration increased.All the films were Se rich in the surface.The thickness of the films had an effect on their optical properties,the absorbance grew up with the thickness increase.

关 键 词：化学液相沉积 PbSe薄膜 薄膜生长 

分 类 号：TK511.4[动力工程及工程热物理—热能工程]