声光式外差干涉仪的光路设计与分析  

Analysis and design of acousto-optic heterodyne interferometer

作　　者：句爱松[1] 侯文玫[1] 

机构地区：[1]上海理工大学光学信息与计算机工程学院,上海200093

出　　处：《光学仪器》2011年第2期25-28,共4页Optical Instruments

摘　　要：制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量。文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量。Development of manufacturing industry urgently needs to measurement and location the objects in high speed machining processes. The acousto-optic modulator can generate high frequency difference, so we can achieve high speed measurement by introducing acousto-optic modulator into heterodyne interferometer. Optical design of acousto-optie heterodyne interferometer has been analyzed in this article. A scheme was proposed to realize the space isolation of the first diffraction light and zero-order diffraction light. The analysis of light beat reception and optical adjustment has been done. Test result proved the project can be used for heterodyne interferometer measurement.

关 键 词：声光调制器 外差干涉仪 光路调整 

分 类 号：TH741[机械工程—光学工程]