可溯源至质量的静电力复现与测量技术  

Electrostatic force reproducing and measurement technology traceable to mass

作　　者：齐永岳[1] 刘明[1] 林玉池[1] 付鲁华[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《仪器仪表学报》2011年第5期1063-1068,共6页Chinese Journal of Scientific Instrument

基　　金：天津市自然科学基金(No.09JCYBJC5200)资助项目

摘　　要：为实现10-5N以下微小力值的测量及溯源,提出了一种高精度、可溯源至质量的微小力值测量系统,采用受控静电力发生装置复现微小力值,其基本工作原理是基于一种精密设计的圆柱形电容器,电容器内外电极同轴,外电极固定不动作为参考电极,内电极由弹性机构支撑和导向,通过改变内外电极间的电压产生静电力,从而将力学量追溯至电容及电压等电学量,利用砝码质量与静电力平衡的原理,可以实现微小力值的溯源。实验结果表明：电容变化梯度为0.82 pF/mm,完全可以复现10-6~10-9N范围内的静电力。To realize the measurement and traceability of micro force value below 10-5 N,a micro force measuring system traceable to mass standard with high precision is proposed.A controlled electrostatic force generator is adopted to reproduce micro force.The basic working principle is based on a precisely designed cylindrical capacitor with the outer electrode serving as the reference and the inner electrode suspended and guided by a rectilinear flexure mechanism.An electrostatic force is generated by the voltage between the electrodes so that mechanical quantity is linked to electrical capacity.The capacitor can be used in a null-displacement mode to compare the electrostatic force with the force generated by the calibrated deadweight of a nominal mass.Experiments show that the capacitance change gradient is 0.82 pF/mm so that the electrostatic force in the range of 10-6～10-9 N can be reproduced completely.

关 键 词：微小力值 电容变化梯度 静电力 电容传感器 

分 类 号：TH82[机械工程—仪器科学与技术]