用激光驱动气相反应制备Si_3N_4超细粉  

Si_3N_4 Superfine Powders Prepared by Laser Driven Gas Reaction Method

作　　者：栾松岩[1] 梁唯红[1] 朱紫冬[1] 秦汝虎[2] 姜春生[2] 段晓丹[2] 

机构地区：[1]黑龙江省科学院技术物理所 [2]哈尔滨工业大学应用物理系

出　　处：《无机材料学报》1990年第3期245-250,共6页Journal of Inorganic Materials

摘　　要：本文叙述了用CW-CO_2激光作热源,驱动硅烷和氨反应,制备Si_3N_4超细粉。讨论了制备超细粉所用的实验装置和工艺条件。Si_3N_4 superfine powders were prepared by CW-CO_2 laser heating gas-phase reactants of SiH_4 and NH_3.In this paper,the processing conditions and experimental instrument for making the Si_3N_4 powders are discussed.

关 键 词：氮化硅 激光驱动 气相反应 超细粉 

分 类 号：TF123.34[冶金工程—粉末冶金]