衬底温度对太阳电池铝背反射电极性能的影响  

THE INFLUENCE OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF Al BACK REFLECTOR

作　　者：韩安军[1,2] 张建军[1] 李林娜[1] 张洪[1,2] 刘彩池[2] 耿新华[1] 赵颖[1] 

机构地区：[1]南开大学光电子薄膜器件与技术研究所,南开大学光电子薄膜器件与技术天津市重点实验室,光电信息技术科学教育部重点实验室,天津300071 [2]河北工业大学材料学院,天津300130

出　　处：《太阳能学报》2011年第5期698-703,共6页Acta Energiae Solaris Sinica

基　　金：国家重点基础研究发展(973)计划(2006CB20260;22006CB202603);国家高技术研究发展(863)计划(2009AA05Z422);天津市应用基础及前沿技术研究计划(08JCZDJC22200);天津市国家科技计划配套项目(07QTPTJC29500)

摘　　要：采用中频脉冲磁控溅射在不同衬底温度下制备了太阳电池铝背反射电极,利用X射线衍射仪(XRD)研究了薄膜晶体结构,用X射线光电子谱仪(XPS)分析薄膜的成分,用原子力显微镜(AFM)观察薄膜表面形貌和粗糙度,用分光光度计研究薄膜的反射率。研究发现随衬底温度升高,薄膜中氧含量增加,晶体结构变为混合晶面取向,晶化率降低,表面粗糙度增大,反射率下降。将其应用到NIP非晶硅薄膜太阳电池中,在衬底温度为300℃时,得到了5.6%的电池转换效率。The Al back reflector was prepared by mid-frequency pulse magnetron sputtering at different substmte temperatures. The crystal structure of Al film was studied by XRD; the component of film studied by XPS; the film surface morphology and roughness studied by AFM; the reflection of film studied by spectrophotometer. It is found that the oxygen content increases in the film with increasing the substrate temperature, crystal structure becames into a mixed-crystal plane orientation, the surface roughness increased and reflection reduced. It was applied to n-i-p amorphous silieon solar cells and found that the solar cells conversion efficiency reach 5.6 % at the substrate temperature of 300℃.

关 键 词：中频脉冲磁控溅射 衬底温度 铝背反射电极 表面形貌 

分 类 号：TM615[电气工程—电力系统及自动化]