基于白光的双波长相移干涉的误差分析  

Error Analysis on Two wavelength White light Phase shifting interferometry

作　　者：周明宝[1] 林大键[1] 郭履容[2] 郭永康 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都610209 [2]四川联合大学物理系,成都610041

出　　处：《光学精密工程》1999年第5期106-113,共8页Optics and Precision Engineering

摘　　要：概略介绍了基于白光的双波长相移干涉表面形貌测量系统的原理，具体分析了影响测量精度的各种误差因素，给出了相应的误差计算公式和计算结果，并用模拟测量结果和实际测量结果进行了验证和比较。The theory of the two wavelength white light phase shifting topography measuring system is described in brief. Many sources that lead to measuring errors are analyzed, and the relative error calculating formulas and results are given. Their validity is verified by comparison with the simulated result and the measured result.

关 键 词：相移干涉 表面形貌 测量 测量精度 白光 

分 类 号：O436.1[机械工程—光学工程] TH744.3[理学—光学]